LAwave - with 4 inch dia. stage

 

LAwave - with 12 inch dia. stage

LAwave - system

 

Surface acoustic waves:

  • A mechanical vibration propagates along the surface.
  • The amplitude decays exponentially in the material.
  • The penetration depth reduces with increasing frequency.
  • Measurable wave parameter - phase velocity:
for homogeneous, isotropic material: CurveExample
E = Young’s modulus,
nju = Poisson’s ratio,
rho = density,

 

Surface acoustic waves in coated materials:

low frequency

deep penetration
substrate determines the wave velocity
 

high frequency

low penetration
film determines the wave velocity

Equation

  • It follows: In coated materials, the surface wave velocity depends on frequency, termed dispersion.
frequency => 0: Phase velocity -> velocity of the substrate
frequency => infinitely: Phase velocity -> velocity of the film,

 

The dispersion curve:

Phase velocity depending on frequency:
Penetration

 

Coated material:

  • The velocity depends on frequency. The curve may ascend or descend, depending on the ratio of Young’s modulus to density is higher for the film or for the substrate.

 

Pure substrate:

The phase velocity is constant, e.g. it does not depend on frequency.

Material properties revealing in the dispersion curve:

  • film modulus - the slope,
  • substrate modulus - velocity at zero frequency,

What has the laser-acoustic technique to do ?

  1. Measuring the dispersion curve.
  2. Fitting a theory to the measured curve to calculate the material parameters.

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